APA (7th ed.) Citation

Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Digital Library.

MLA (8th ed.) Citation

Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.