Cita APA (7a ed.)

Behringer, U. 29th European Mask and Lithography Conference. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Behringer, Uwe. 29th European Mask and Lithography Conference. SPIE Digital Library.

Cita MLA (8a ed.)

Behringer, Uwe. 29th European Mask and Lithography Conference. SPIE Digital Library.

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