Takehisa, K. Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Chicago Style (17th ed.) CitationTakehisa, Kiwamu. Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
MLA (8th ed.) CitationTakehisa, Kiwamu. Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.