Cita APA

Behringer, U. 34th European Mask and Lithography Conference. SPIE Digital Library.

Citación estilo Chicago

Behringer, Uwe. 34th European Mask and Lithography Conference. SPIE Digital Library.

Cita MLA

Behringer, Uwe. 34th European Mask and Lithography Conference. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.