Bakshi, V. EUV Lithography, Second Edition. SPIE Digital Library.
Cita Chicago (17th ed.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE Digital Library.
Cita MLA (8th ed.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.