Engelmann, S. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Cita Chicago (17th ed.)Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Cita MLA (8th ed.)Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.