Cita APA

Ukraintsev, V. A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Citación estilo Chicago

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Cita MLA

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.