APA (7th ed.) Citation

Goldberg, K. Extreme Ultraviolet (EUV) Lithography IX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Goldberg, Kenneth. Extreme Ultraviolet (EUV) Lithography IX. SPIE Digital Library.

MLA (8th ed.) Citation

Goldberg, Kenneth. Extreme Ultraviolet (EUV) Lithography IX. SPIE Digital Library.

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