Behringer, U. 32nd European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 32nd European Mask and Lithography Conference. SPIE Digital Library.
MLA (8th ed.) AtıfBehringer, Uwe. 32nd European Mask and Lithography Conference. SPIE Digital Library.
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