Yanof, A. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
Chicago Style (17. basım) AtıfYanof, Arnold. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
MLA (8th ed.) AtıfYanof, Arnold. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
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