Monahan, K. Integrated Circuit Metrology, Inspection, and Process Control II. SPIE Digital Library.
Cita Chicago (17th ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, and Process Control II. SPIE Digital Library.
Cita MLA (8th ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, and Process Control II. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.