Stover, H. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
Chicago Style aipamenaStover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
MLA aipamenaStover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
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