APA (7th ed.) Citation

Stover, H. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Stover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.

MLA (8th ed.) Citation

Stover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.