Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Cita Chicago (17th ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Cita MLA (8th ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.