Monahan, K. Micron and Submicron Integrated Circuit Metrology. SPIE Digital Library.
Citación estilo ChicagoMonahan, Kevin. Micron and Submicron Integrated Circuit Metrology. SPIE Digital Library.
Cita MLAMonahan, Kevin. Micron and Submicron Integrated Circuit Metrology. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.