APA (7th ed.) Citation

Monahan, K. Micron and Submicron Integrated Circuit Metrology. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Monahan, Kevin. Micron and Submicron Integrated Circuit Metrology. SPIE Digital Library.

MLA (8th ed.) Citation

Monahan, Kevin. Micron and Submicron Integrated Circuit Metrology. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.