APA ציטוט

Wagner, A. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.

ציטוט MLA

Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.