APA (7th ed.) Citation

Allen, S. Laser-Assisted Deposition, Etching, and Doping. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allen, Susan. Laser-Assisted Deposition, Etching, and Doping. SPIE Digital Library.

MLA (8th ed.) Citation

Allen, Susan. Laser-Assisted Deposition, Etching, and Doping. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.