Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II
| Altres autors: | |
|---|---|
| Format: | Electrònic Llibre |
| Idioma: | English |
| Publicat: |
SPIE Digital Library,
11/7/83
|
| Matèries: | |
| Accés en línia: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Descripció de l’ítem: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Descripció física: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780892524280 |
| Accés: | Electronic access restricted to authorized BRAC University faculty, staff and students |