APA (7th ed.) Citation

Stover, H. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Stover, Harry. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.

MLA (8th ed.) Citation

Stover, Harry. Optical Microlithography I: Technology for the Mid-1980s. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.