Handbook of Critical Dimension Metrology and Process Control: A Critical Review
| Další autoři: | |
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| Médium: | Elektronický zdroj Kniha |
| Jazyk: | English |
| Vydáno: |
SPIE Digital Library,
1/1/16
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| Témata: | |
| On-line přístup: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Popis jednotky: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Fyzický popis: | 1 online resource |
| Médium: | Mode of access: Internet |
| ISBN: | 9781510610323 |
| Přístup: | Electronic access restricted to authorized BRAC University faculty, staff and students |