Monahan, K. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Monahan, Kevin. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.
Citatione MLA (8a ed.)Monahan, Kevin. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.