Optical Microlithography XXX

Bibliografski detalji
Daljnji autori: Erdmann, Andreas
Format: Elektronički Knjiga
Jezik:English
Izdano: SPIE Digital Library, 4/24/17
Teme:
Online pristup:Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue: View this record in Classic Catalogue
Opis
Opis djela:<strong>On-Campus Access Only (IP based access)</strong>
Opis:1 online resource
Format:Mode of access: Internet
ISBN:9781510607453
9781510607460
Pristup:Electronic access restricted to authorized BRAC University faculty, staff and students