APA (7th ed.) Citation

Erdmann, A. Optical Microlithography XXX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Erdmann, Andreas. Optical Microlithography XXX. SPIE Digital Library.

MLA (8th ed.) Citation

Erdmann, Andreas. Optical Microlithography XXX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.