APA (7th ed.) Citation

Panning, E. Extreme Ultraviolet (EUV) Lithography VIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Panning, Eric. Extreme Ultraviolet (EUV) Lithography VIII. SPIE Digital Library.

MLA (8th ed.) Citation

Panning, Eric. Extreme Ultraviolet (EUV) Lithography VIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.