APA aipamena

Ukraintsev, V. Metrology, Inspection, and Process Control for Microlithography XXXIII. SPIE Digital Library.

Chicago Style aipamena

Ukraintsev, Vladimir. Metrology, Inspection, and Process Control for Microlithography XXXIII. SPIE Digital Library.

MLA aipamena

Ukraintsev, Vladimir. Metrology, Inspection, and Process Control for Microlithography XXXIII. SPIE Digital Library.

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