Sanchez, M. Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019. SPIE Digital Library.
Chicago Style (17. basım) AtıfSanchez, Martha. Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019. SPIE Digital Library.
MLA (8th ed.) AtıfSanchez, Martha. Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019. SPIE Digital Library.
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