Ando, A. Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Chicago-referens (17:e uppl.)Ando, Akihiko. Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
MLA-referens (8:e uppl.)Ando, Akihiko. Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
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