APA (7th ed.) Citation

Bannister, J. Advanced Etch Technology and Process Integration for Nanopatterning X. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Bannister, Julie. Advanced Etch Technology and Process Integration for Nanopatterning X. SPIE Digital Library.

MLA (8th ed.) Citation

Bannister, Julie. Advanced Etch Technology and Process Integration for Nanopatterning X. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.