Cita APA (7a ed.)

Erdmann, A. Optical and EUV Lithography: A Modeling Perspective. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Erdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE Digital Library.

Cita MLA (8a ed.)

Erdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE Digital Library.

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