APA (7th ed.) Citation

Naulleau, P. Extreme Ultraviolet Lithography 2020. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Naulleau, Patrick. Extreme Ultraviolet Lithography 2020. SPIE Digital Library.

MLA (8th ed.) Citation

Naulleau, Patrick. Extreme Ultraviolet Lithography 2020. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.