Cita APA

Owa, S. Optical Microlithography XXXIII. SPIE Digital Library.

Citación estilo Chicago

Owa, Soichi. Optical Microlithography XXXIII. SPIE Digital Library.

Cita MLA

Owa, Soichi. Optical Microlithography XXXIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.