APA aipamena

Kato, K. Photomask and Next-Generation Lithography Mask Technology XXI. SPIE Digital Library.

Chicago Style aipamena

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XXI. SPIE Digital Library.

MLA aipamena

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XXI. SPIE Digital Library.

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