APA (7th ed.) Citation

Behringer, U. 30th European Mask and Lithography Conference. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. 30th European Mask and Lithography Conference. SPIE Digital Library.

MLA (8th ed.) Citation

Behringer, Uwe. 30th European Mask and Lithography Conference. SPIE Digital Library.

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