38th European Mask and Lithography Conference (EMLC 2023)

Bibliographic Details
Other Authors: Behringer, Uwe F.W
Format: Electronic Book
Language:English
Published: SPIE Digital Library, 1/1/23
Subjects:
Online Access:Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue: View this record in Classic Catalogue
Description
Item Description:<strong>On-Campus Access Only (IP based access)</strong>
Physical Description:1 online resource
Format:Mode of access: Internet
ISBN:9781510668607
9781510668614
Access:Electronic access restricted to authorized BRAC University faculty, staff and students