Cita APA

Behringer, U. F. 38th European Mask and Lithography Conference (EMLC 2023). SPIE Digital Library.

Citación estilo Chicago

Behringer, Uwe F.W. 38th European Mask and Lithography Conference (EMLC 2023). SPIE Digital Library.

Cita MLA

Behringer, Uwe F.W. 38th European Mask and Lithography Conference (EMLC 2023). SPIE Digital Library.

Warning: These citations may not always be 100% accurate.