Mohanty, N. Advanced Etch Technology and Process Integration for Nanopatterning XII. SPIE Digital Library.
Cita Chicago (17th ed.)Mohanty, Nihar. Advanced Etch Technology and Process Integration for Nanopatterning XII. SPIE Digital Library.
Cita MLA (8th ed.)Mohanty, Nihar. Advanced Etch Technology and Process Integration for Nanopatterning XII. SPIE Digital Library.
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