APA (7th ed.) Citation

Yoshioka, N. Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Yoshioka, Nobuyuki. Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII. SPIE Digital Library.

MLA (8th ed.) Citation

Yoshioka, Nobuyuki. Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.