APA (7th ed.) Citation

Karthe, W. Nanofabrication Technologies and Device Integration. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Karthe, Wolfgang. Nanofabrication Technologies and Device Integration. SPIE Digital Library.

MLA (8th ed.) Citation

Karthe, Wolfgang. Nanofabrication Technologies and Device Integration. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.