Patterson, D. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV. SPIE Digital Library.
Chicago Style (17th ed.) CitationPatterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV. SPIE Digital Library.
MLA citiranjePatterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV. SPIE Digital Library.
Opozorilo: Ti citati niso vedno 100% točni.