APA (7th ed.) Citation

Cuthbert, J. Optical/Laser Microlithography. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Cuthbert, John. Optical/Laser Microlithography. SPIE Digital Library.

MLA (8th ed.) Citation

Cuthbert, John. Optical/Laser Microlithography. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.