Cita APA

Patterson, D. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.

Citación estilo Chicago

Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.

Cita MLA

Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.

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