Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography

Bibliographische Detailangaben
Weitere Verfasser: Hoover, Richard
Format: Elektronisch Buch
Sprache:English
Veröffentlicht: SPIE Digital Library, 1/21/93
Schlagworte:
Online Zugang:Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue: View this record in Classic Catalogue
Beschreibung
Beschreibung:<strong>On-Campus Access Only (IP based access)</strong>
Beschreibung:1 online resource
Format:Mode of access: Internet
ISBN:9780819409157
Zugangseinschränkungen:Electronic access restricted to authorized BRAC University faculty, staff and students