Integrated Circuit Metrology, Inspection, and Process Control VI

Détails bibliographiques
Autres auteurs: Postek, Michael
Format: Électronique Livre
Langue:English
Publié: SPIE Digital Library, 6/1/92
Sujets:
Accès en ligne:Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue: View this record in Classic Catalogue
Description
Description:<strong>On-Campus Access Only (IP based access)</strong>
Description matérielle:1 online resource
Format:Mode of access: Internet
ISBN:9780819408280
Accès:Electronic access restricted to authorized BRAC University faculty, staff and students