Peckerar, M. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
Cita Chicago (17th ed.)Peckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
Cita MLA (8th ed.)Peckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
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