Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing
| Diğer Yazarlar: | |
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| Materyal Türü: | Elektronik Kitap |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
SPIE Digital Library,
8/1/91
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| Konular: | |
| Online Erişim: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Diğer Bilgileri: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Fiziksel Özellikler: | 1 online resource |
| Materyal Türü: | Mode of access: Internet |
| ISBN: | 9780819405647 |
| Erişim: | Electronic access restricted to authorized BRAC University faculty, staff and students |