APA (7th ed.) Citation

Pol, V. Optical/Laser Microlithography III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Pol, Victor. Optical/Laser Microlithography III. SPIE Digital Library.

MLA (8th ed.) Citation

Pol, Victor. Optical/Laser Microlithography III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.