2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Bibliographic Details
Format:	Electronic Book
Language:	English
Published:	IEEE
Subjects:	Components, Circuits, Devices and Systems; Computing and Processing; Engineered Materials, Dielectrics and Plasmas Conference papers and proceedings.
Online Access:	Full text available on IEEE [2017-2023] Off-campus access
Classic Catalogue:	View this record in Classic Catalogue

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