APA (7th ed.) Citation

Proceedings of International Conference on Planarization/CMP Technology 2014. IEEE.

Chicago Style (17th ed.) Citation

Proceedings of International Conference on Planarization/CMP Technology 2014. IEEE.

MLA (8th ed.) Citation

Proceedings of International Conference on Planarization/CMP Technology 2014. IEEE.

Warning: These citations may not always be 100% accurate.