Cleanroom technology : fundamentals of design, testing and operation /
| 第一著者: | |
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| フォーマット: | 図書 |
| 言語: | English |
| 版: | Second edition. |
| 主題: | |
| Classic Catalogue: | View this record in Classic Catalogue |
| 記述事項: | Includes index. |
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| 物理的記述: | xi, 367 pages : illustrations ; 23 cm. |
| ISBN: | 9780470748060 (cloth) |