Cleanroom technology : fundamentals of design, testing and operation /
1. Verfasser: | |
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Format: | Buch |
Sprache: | English |
Ausgabe: | Second edition. |
Schlagworte: | |
Classic Catalogue: | View this record in Classic Catalogue |
Beschreibung: | Includes index. |
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Beschreibung: | xi, 367 pages : illustrations ; 23 cm. |
ISBN: | 9780470748060 (cloth) |