Cleanroom technology : fundamentals of design, testing and operation /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Edition: | Second edition. |
| Subjects: | |
| Classic Catalogue: | View this record in Classic Catalogue |
| Item Description: | Includes index. |
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| Physical Description: | xi, 367 pages : illustrations ; 23 cm. |
| ISBN: | 9780470748060 (cloth) |